Invention Application
- Patent Title: PLASMA PROCESSING DEVICE AND OPERATION METHOD
-
Application No.: US15165064Application Date: 2016-05-26
-
Publication No.: US20160268105A1Publication Date: 2016-09-15
- Inventor: Shigehiro MIURA , Hitoshi KATO , Jun SATO , Takeshi KOBAYASHI , Masato YONEZAWA
- Applicant: Tokyo Electron Limited
- Priority: JP2014-029179 20140219
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/50 ; C23C16/52 ; C23C16/455

Abstract:
An operation method of a plasma processing device, includes performing a plasma process on a workpiece by supplying first high frequency power of a predetermined output to an electrode and generating plasma; and performing a charge storage process before the plasma process when a time interval from an end of a previous operation of the plasma processing device exceeds a predetermined interval, the charge storage process including supplying, to the electrode, second high frequency power of a lower output than the predetermined output.
Public/Granted literature
- US10103009B2 Plasma processing device and operation method Public/Granted day:2018-10-16
Information query