Invention Application
US20160270237A1 Copper Interconnect Device Including Surface Functionalized Graphene Capping Layer and Fabrication Method Thereof 审中-公开
包括表面官能化石墨烯封盖层的铜互连器件及其制造方法

Copper Interconnect Device Including Surface Functionalized Graphene Capping Layer and Fabrication Method Thereof
Abstract:
Disclosed is a copper interconnection device including a surface-functionalized graphene capping layer and a method of fabricating the same, wherein electromigration of a fine copper interconnection can be suppressed by the capping layer having a thickness of ones of nm or less. Specifically, graphene is surface-functionalized to possess functional groups able to chemically interact with copper atoms and is thus used as the capping layer, whereby it is difficult to move the copper atoms through the chemical interaction with the functional groups by the use of only the capping layer as thin as ones of nm or less, effectively suppressing electromigration of the copper interconnection.
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