发明申请
- 专利标题: Semiconductor Device
- 专利标题(中): 半导体器件
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申请号: US15034286申请日: 2014-10-22
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公开(公告)号: US20160276477A1公开(公告)日: 2016-09-22
- 发明人: Shinichirou WADA
- 申请人: HITACHI AUTOMOTIVE SYSTEMS, LTD.
- 优先权: JP2013-233622 20131112
- 国际申请: PCT/JP2014/078012 WO 20141022
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L29/06 ; H01L29/40 ; H01L29/10 ; H01L29/08
摘要:
To provide a high-withstand-voltage lateral semiconductor device in which ON-resistance or drain current density is uniform at an end portion and a center portion of the device in a gate width direction. A lateral N-type MOS transistor 11 formed on an SOI substrate includes a trench isolation structure 10b filled with an insulating film at an end portion of the transistor. An anode region 6 of a diode 12 is provided adjacent to a P-type body region 1 of the transistor through the trench isolation structure 10b and a cathode region 15 of the diode 12 is also provided adjacent to an N-type drain-drift region 4 of the transistor through the trench isolation structure 10b so as to cause electric field to be applied to the trench isolation structure 10b to be zero when a voltage is applied across the transistor.
公开/授权文献
- US10211337B2 Semiconductor device 公开/授权日:2019-02-19
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