Invention Application
- Patent Title: SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING THE SAME, OR DISPLAY DEVICE INCLUDING THE SAME
- Patent Title (中): 半导体器件,其制造方法或包括其的显示器件
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Application No.: US15070306Application Date: 2016-03-15
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Publication No.: US20160276486A1Publication Date: 2016-09-22
- Inventor: Junichi KOEZUKA , Kenichi OKAZAKI , Masami JINTYOU , Daisuke KUROSAKI , Takahiro IGUCHI , Naoto GOTO , Shunpei YAMAZAKI
- Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Priority: JP2015-052912 20150317; JP2015-065103 20150326
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/49 ; H01L29/04 ; H01L29/24

Abstract:
To suppress a change in electrical characteristics and improve reliability in a transistor including an oxide semiconductor film. Provided is a semiconductor device including a transistor including a first gate electrode, a first insulating film over the first gate electrode, a first oxide semiconductor film over the first insulating film, a source electrode electrically connected to the first oxide semiconductor film, a drain electrode electrically connected to the first oxide semiconductor film, a second insulating film over the first oxide semiconductor film, a second oxide semiconductor film as a second gate electrode over the second insulating film, and a third insulating film over the second oxide semiconductor film. The second insulating film includes an excess oxygen region having a concentration gradient.
Public/Granted literature
- US10008609B2 Semiconductor device, method for manufacturing the same, or display device including the same Public/Granted day:2018-06-26
Information query
IPC分类: