Invention Application
US20160307869A1 LASER DIE BACKSIDE FILM REMOVAL FOR INTEGRATED CIRCUIT (IC) PACKAGING
审中-公开
用于集成电路(IC)封装的激光背胶膜拆除
- Patent Title: LASER DIE BACKSIDE FILM REMOVAL FOR INTEGRATED CIRCUIT (IC) PACKAGING
- Patent Title (中): 用于集成电路(IC)封装的激光背胶膜拆除
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Application No.: US15196866Application Date: 2016-06-29
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Publication No.: US20160307869A1Publication Date: 2016-10-20
- Inventor: Danish Faruqui , Edward R. Prack , Sergei L. Voronov , David K. Wilkinson, JR. , Tony Dambrauskas , Lars D. Skoglund , Yoshihiro Tomita , Mihir A. Oka , Rajen C. Dias
- Applicant: INTEL CORPORATION
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/56 ; H01L23/498 ; H01L23/538 ; H01L21/768 ; H01L25/065

Abstract:
Embodiments of the present disclosure are directed to die adhesive films for integrated circuit (IC) packaging, as well as methods for forming and removing die adhesive films and package assemblies and systems incorporating such die adhesive films. A die adhesive film may be transparent to a first wavelength of light and photoreactive to a second wavelength of light. In some embodiments, the die adhesive film may be applied to a back or “inactive” side of a die, and the die surface may be detectable through the die adhesive film. The die adhesive film may be cured and/or marked with laser energy having the second wavelength of light. The die adhesive film may include a thermochromic dye and/or nanoparticles configured to provide laser mark contrast. UV laser energy may be used to remove the die adhesive film in order to expose underlying features such as TSV pads.
Public/Granted literature
- US09859248B2 Laser die backside film removal for integrated circuit (IC) packaging Public/Granted day:2018-01-02
Information query
IPC分类: