公开(公告)号：US20160307869A1

公开(公告)日：2016-10-20

申请号：US15196866

申请日：2016-06-29

Applicant: INTEL CORPORATION

Inventor： Danish Faruqui ,  Edward R. Prack ,  Sergei L. Voronov ,  David K. Wilkinson, JR. ,  Tony Dambrauskas ,  Lars D. Skoglund ,  Yoshihiro Tomita ,  Mihir A. Oka ,  Rajen C. Dias

IPC: H01L23/00 ,  H01L21/56 ,  H01L23/498 ,  H01L23/538 ,  H01L21/768 ,  H01L25/065

CPC classification number: H01L24/83 ,  H01L21/56 ,  H01L21/568 ,  H01L21/76898 ,  H01L23/49816 ,  H01L23/5389 ,  H01L23/544 ,  H01L24/13 ,  H01L24/16 ,  H01L24/19 ,  H01L24/29 ,  H01L24/32 ,  H01L24/73 ,  H01L24/75 ,  H01L24/81 ,  H01L24/92 ,  H01L25/0657 ,  H01L2223/54426 ,  H01L2223/54486 ,  H01L2224/0401 ,  H01L2224/04105 ,  H01L2224/0557 ,  H01L2224/06181 ,  H01L2224/08225 ,  H01L2224/131 ,  H01L2224/13147 ,  H01L2224/16145 ,  H01L2224/2929 ,  H01L2224/293 ,  H01L2224/29311 ,  H01L2224/29318 ,  H01L2224/29323 ,  H01L2224/29324 ,  H01L2224/29347 ,  H01L2224/29366 ,  H01L2224/29387 ,  H01L2224/29393 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/73259 ,  H01L2224/73267 ,  H01L2224/81132 ,  H01L2224/83132 ,  H01L2224/83191 ,  H01L2224/83192 ,  H01L2224/83224 ,  H01L2224/92125 ,  H01L2224/92143 ,  H01L2224/9222 ,  H01L2224/94 ,  H01L2225/06541 ,  H01L2924/10252 ,  H01L2924/10253 ,  H01L2924/10328 ,  H01L2924/10329 ,  H01L2924/10332 ,  H01L2924/10335 ,  H01L2924/10525 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/1431 ,  H01L2924/1433 ,  H01L2924/1434 ,  H01L2924/15311 ,  H01L2924/15787 ,  H01L2924/15788 ,  H01L2924/1579 ,  H01L2924/18161 ,  H01L2924/3511 ,  H01L2924/014 ,  H01L2224/27 ,  H01L2924/0535 ,  H01L2924/01023 ,  H01L2924/00

Abstract: Embodiments of the present disclosure are directed to die adhesive films for integrated circuit (IC) packaging, as well as methods for forming and removing die adhesive films and package assemblies and systems incorporating such die adhesive films. A die adhesive film may be transparent to a first wavelength of light and photoreactive to a second wavelength of light. In some embodiments, the die adhesive film may be applied to a back or “inactive” side of a die, and the die surface may be detectable through the die adhesive film. The die adhesive film may be cured and/or marked with laser energy having the second wavelength of light. The die adhesive film may include a thermochromic dye and/or nanoparticles configured to provide laser mark contrast. UV laser energy may be used to remove the die adhesive film in order to expose underlying features such as TSV pads.

Abstract translation: 本公开的实施例涉及用于集成电路（IC）封装的芯片粘合膜，以及用于形成和去除模具粘合剂膜和封装组件的方法以及结合这种模具粘合剂膜的系统。 模具粘合剂膜可以对第一波长的光是透明的，并且对第二波长的光进行光反应。 在一些实施例中，模具粘合剂膜可以施加到模具的背面或“非活性”侧，并且模具表面可以通过模具粘合剂膜检测。 模具粘合剂膜可以用具有第二波长的光的激光能量固化和/或标记。 模具粘合剂膜可以包括被配置为提供激光标记对比度的热变色染料和/或纳米颗粒。 可以使用UV激光能量去除模具粘合剂膜以暴露诸如TSV焊盘之类的底层特征。