Invention Application
- Patent Title: PRESSURE-TYPE FLOW CONTROL DEVICE AND METHOD FOR PREVENTING OVERSHOOTING AT START OF FLOW CONTROL PERFORMED BY SAID DEVICE
- Patent Title (中): 压力型流量控制装置及在设备开始流动控制时防止过冲的方法
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Application No.: US15110208Application Date: 2015-01-15
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Publication No.: US20160327963A1Publication Date: 2016-11-10
- Inventor: Kaoru HIRATA , Nobukazu IKEDA , Kouji NISHINO , Ryousuke DOHI , Katsuyuki SUGITA , Masaaki NAGASE
- Applicant: FUJIKIN INCORPORATED
- Applicant Address: JP Osaka
- Assignee: FUJIKIN INCORPORATED
- Current Assignee: FUJIKIN INCORPORATED
- Current Assignee Address: JP Osaka
- Priority: JP2014-008831 20140121
- International Application: PCT/JP2015/000154 WO 20150115
- Main IPC: G05D7/06
- IPC: G05D7/06 ; H01L21/67 ; F16K31/12 ; F16K7/14 ; F16K31/02 ; F16K31/06
Abstract:
The pressure-type flow control device includes: a main body provided with a fluid channel communicating between a fluid inlet and a fluid outlet and an exhaust channel communicating between the fluid channel and an exhaust outlet; a pressure control valve fixed to a fluid inlet side of the main body for opening or closing the upstream side of the fluid channel; a first pressure sensor for detecting the internal pressure of the fluid channel on the downstream side of the control valve; an orifice provided in the fluid channel on the downstream side of the point of branching of the exhaust channel; an on/off valve for opening or closing the fluid channel on the downstream side of the first pressure sensor; and an exhaust valve for opening or closing the exhaust channel.
Public/Granted literature
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