公开(公告)号：US20240288361A1

公开(公告)日：2024-08-29

申请号：US18568691

申请日：2022-06-29

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Hidekazu ISHII ,  Kosuke SUGIMOTO ,  Takashi FUKAWA ,  Wataru ASHINO

IPC: G01N21/31 ,  G01N21/03 ,  G01N21/25 ,  G01N21/85

CPC classification number: G01N21/31 ,  G01N21/0303 ,  G01N21/255 ,  G01N21/85 ,  G01N2021/0389 ,  G01N2021/8578 ,  G01N2201/0638

Abstract: Provided is a concentration measurement device that can be miniaturized without using an optical fiber. The concentration measurement device including a measurement cell having a gas flow path and an optical path intersecting the gas flow path; a light source for emitting light inside the optical path, the light source 14 being installed at one end of the optical path; a first photodetector for detecting a light emitted from the light source as a reference light, the first photodetector being installed at a side of the light source and rearward from a distal end of the light source in a light emitting direction along an optical axis of the light source; a second photodetector for detecting a light emitted from the light source for measuring light absorption, the second photodetector being installed at another end of the optical path.

公开(公告)号：US20220283081A1

公开(公告)日：2022-09-08

申请号：US17637617

申请日：2020-08-31

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Masahiko TAKIMOTO ,  Kazuteru TANAKA ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G01N21/27 ,  G01N21/05 ,  G01N21/17

Abstract: The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, a first light-transmission member 11 for transmitting light from the light source to the measurement cell, a second light transmission member 12 for transmitting light from the measurement cell to the photodetector, a lens 3A provided in the fluid unit, the lens 3A being arranged such that light from the first light transmission member is to be incident on the first position and light is to be emitted from the second position to the second light transmission member, a pressure sensor 5 for measuring pressure of fluid flowing through the measurement cell, and an arithmetic circuit 28 for detecting concentration of the fluid flowing through the measurement cell, the arithmetic circuit being configured to calculate the fluid concentration based on the output of the photodetector and a correction factor related to the pressure output by the pressure sensor and the concentration of fluid in order to reduce the measurement error due to the refractive index of the fluid.

公开(公告)号：US20220197316A1

公开(公告)日：2022-06-23

申请号：US17605948

申请日：2020-04-16

Applicant: FUJIKIN INCORPORATED

Inventor： Kaoru HIRATA ,  Keisuke IDEGUCHI ,  Shinya OGAWA ,  Katsuyuki SUGITA ,  Masaaki NAGASE ,  Kouji NISHINO ,  Nobukazu IKEDA ,  Hiroyuki ITO

IPC: G05D7/06 ,  G01L13/06

Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ΔP between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.

公开(公告)号：US20200088561A1

公开(公告)日：2020-03-19

申请号：US16471768

申请日：2017-12-22

Applicant: FUJIKIN INCORPORATED

Inventor： Atsushi HIDAKA ,  Takatoshi NAKATANI ,  Satoru YAMASHITA ,  Katsuyuki SUGITA ,  Kaoru HIRATA ,  Masaaki NAGASE ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G01F23/22 ,  B01J4/02 ,  C23C16/448 ,  H01L21/67 ,  G05D9/12

Abstract: The liquid level meter according to the present invention includes a resistive temperature detector, a temperature measuring body located above it, a temperature detecting unit detecting temperatures of the resistive temperature detector and the temperature measuring body, a current controlling unit determining a current value to be flowed through the resistive temperature detector so that the resistive temperature detector and the temperature measuring body become a predetermined temperature difference, a power supply unit supplying the current of the determined current value to the resistive temperature detector, and a liquid level detecting unit detecting a position of a liquid level. The liquid level detecting unit detects the change in the relative position of the liquid level relative to the resistive temperature detector by determining whether a change width of the current value flowing through the resistive temperature detector during a predetermined period of time is positive or negative, and whether the change width is not less than a predetermined value. As a result, the position of the liquid level can be accurately detected without being affected by the variation in the characteristics of the resistive temperature detector.

公开(公告)号：US20190017855A1

公开(公告)日：2019-01-17

申请号：US16069126

申请日：2017-01-12

Applicant: FUJIKIN INCORPORATED

Inventor： Yohei SAWADA ,  Nobukazu IKEDA ,  Kouji NISHINO ,  Masaaki NAGASE

IPC: G01F3/38 ,  G01F15/04

Abstract: A gas supply system includes a flow controller, a first shutoff valve provided downstream of the flow controller, a second shutoff valve provided in a first flow passage communicating with the downstream side of the first shutoff valve, a second flow passage branching from the first flow passage, a third shutoff valve provided in the second flow passage, a pressure sensor that detects a pressure in a flow passage surrounded by the first, second, and third shutoff valves, a temperature sensor that detects a temperature in the flow passage, a volume measuring tank having a known volume connected downstream of the third shutoff valve, and a controller that obtains a volume of the flow passage by applying Boyle's law to open and closed states of the third shutoff valve and calculates the flow rate using the passage volume and outputs of the pressure and temperature sensors.

公开(公告)号：US20160327963A1

公开(公告)日：2016-11-10

申请号：US15110208

申请日：2015-01-15

Applicant: FUJIKIN INCORPORATED

Inventor： Kaoru HIRATA ,  Nobukazu IKEDA ,  Kouji NISHINO ,  Ryousuke DOHI ,  Katsuyuki SUGITA ,  Masaaki NAGASE

IPC: G05D7/06 ,  H01L21/67 ,  F16K31/12 ,  F16K7/14 ,  F16K31/02 ,  F16K31/06

CPC classification number: G05D7/0635 ,  F16K7/14 ,  F16K7/16 ,  F16K31/004 ,  F16K31/02 ,  F16K31/06 ,  F16K31/12 ,  G05D7/0641 ,  H01L21/67253

Abstract: The pressure-type flow control device includes: a main body provided with a fluid channel communicating between a fluid inlet and a fluid outlet and an exhaust channel communicating between the fluid channel and an exhaust outlet; a pressure control valve fixed to a fluid inlet side of the main body for opening or closing the upstream side of the fluid channel; a first pressure sensor for detecting the internal pressure of the fluid channel on the downstream side of the control valve; an orifice provided in the fluid channel on the downstream side of the point of branching of the exhaust channel; an on/off valve for opening or closing the fluid channel on the downstream side of the first pressure sensor; and an exhaust valve for opening or closing the exhaust channel.

Abstract translation: 压力型流量控制装置包括：主体，设置有在流体入口和流体出口之间连通的流体通道和在流体通道和排气出口之间连通的排气通道; 固定到主体的流体入口侧的压力控制阀，用于打开或关闭流体通道的上游侧; 第一压力传感器，用于检测控制阀下游侧的流体通道的内部压力; 设置在排气通道的分支点的下游侧的流体通道中的孔口; 用于打开或关闭第一压力传感器下游侧的流体通道的开/关阀; 以及用于打开或关闭排气通道的排气阀。

公开(公告)号：US20230121563A1

公开(公告)日：2023-04-20

申请号：US17906064

申请日：2021-03-18

Applicant: FUJIKIN INCORPORATED

Inventor： Takatoshi NAKATANI ,  Atsushi HIDAKA ,  Masaaki NAGASE ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G01F22/02 ,  G05D7/06 ,  G05B19/416

Abstract: A gas supply amount measurement method is performed in a gas supply system including a vaporization section, a control valve provided downstream of the vaporization section, and a supply pressure sensor for measuring the supply pressure between the vaporization section and the control valve. The method comprises: a step of measuring an initial supply pressure by the supply pressure sensor in a state where the control valve is closed; a step of opening the control valve for only a predetermined time; a step of measuring for a plurality of times of the supply pressure in a period of time between a time at which the pressure starts to fall from the initial supply pressure and a time at which a predetermined time has elapsed when the control valve is open for only a predetermined time, and a step of determining the gas supply amount when the control valve is open for only a predetermined time by calculation based on the measured values of the plurality of supply pressures.

公开(公告)号：US20220268365A1

公开(公告)日：2022-08-25

申请号：US17638772

申请日：2020-06-12

Applicant: FUJIKIN INCORPORATED

Inventor： Kaoru HIRATA ,  Masaaki NAGASE ,  Atsushi HIDAKA ,  Kazuyuki MORISAKI ,  Keisuke IDEGUCHI ,  Kosuke SUGIMOTO ,  Masafumi KITANO ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: F16K7/17 ,  C09D127/12

Abstract: A diaphragm valve includes a body 3 having a flow path 2 formed therein, a sheet 4 formed in the flow path 2, a metal diaphragm 5 for opening and closing the flow path 2 by abutting on or separating from the sheet 4, a pair of clamping parts 6 and 7 for claiming peripheral edge portions of both side surfaces of the metal diaphragm 5 respectively to fix the metal diaphragm 5 to the body 3, and an actuator 8 for abutting the metal diaphragm 5 on the sheet 4 or separating the metal diaphragm from the sheet 4, wherein a fluorine resin coating is formed on a sheet side surface 5a of the metal diaphragm 5 in a region excluding a clamping region D-C between the sheet side surface 5a and the clamping part 7, and at least in a contact region B-A with the sheet 4 in a region C surrounded by the clamping region D-C.

公开(公告)号：US20190227577A1

公开(公告)日：2019-07-25

申请号：US16327305

申请日：2017-08-24

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Kaoru HIRATA ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G05D7/06 ,  G01F1/50 ,  G05B19/416

Abstract: A pressure-type flow rate control device 1, while maintaining an upstream pressure P1 of an orifice 5 at approximately at least twice a downstream pressure P2, calculates a flow factor FF of a mixed gas consisting of two types of gases mixed at a mixture ratio of X:(1−X) by FF=(k/ρ){2/(κ+1)}1/(κ−1)[κ/{(κ+1)R}]1/2 using an average density ρ, an average specific heat ratio κ, and an average gas constant R of the mixed gas that are calculated by weighting the densities, specific heat ratios, and gas constants of the two types of gases at the mixture ratio, and calculates a flow rate Q of the mixed gas passing through the orifice by Q=FF·S·P1(1/T1)1/2, where S is the orifice cross section, and P1 and T1 are respectively the pressure and temperature of the mixed gas on the upstream side of the orifice.

公开(公告)号：US20180217053A1

公开(公告)日：2018-08-02

申请号：US15748261

申请日：2016-08-09

Applicant: TOKUSHIMA UNIVERSITY ,  FUJIKIN INCORPORATED

Inventor： Yoshihiro DEGUCHI ,  Masaaki NAGASE ,  Michio YAMAJI ,  Nobukazu IKEDA ,  Kouji NISHINO ,  Masayoshi KAWASHIMA ,  Kazuteru TANAKA

IPC: G01N21/31 ,  G01N21/59 ,  G01J3/42

CPC classification number: G01N21/3103 ,  G01J3/0218 ,  G01J3/10 ,  G01J3/28 ,  G01J3/42 ,  G01J3/433 ,  G01J2001/4242 ,  G01J2003/2866 ,  G01N21/274 ,  G01N21/33 ,  G01N21/3504 ,  G01N21/59 ,  G01N2021/3133 ,  G01N2201/0625 ,  G01N2201/0627

Abstract: A concentration measurement device including at least one light source; a measurement cell for containing a fluid to be measured; a splitter for dividing light from the light source into incident light being incident into the measurement cell and non-incident light not being incident into the measurement cell; a transmitted-light detector for detecting transmitted light that is the incident light having passed through the measurement cell; a non-incident light detector for detecting the non-incident light; and an arithmetic part for correcting a detection signal of the transmitted-light detector using a detection signal of the non-incident light detector.