Invention Application
- Patent Title: VERTICAL TRANSISTOR FOR RESISTIVE MEMORY
- Patent Title (中): 电阻记忆体的垂直晶体管
-
Application No.: US15214054Application Date: 2016-07-19
-
Publication No.: US20160329490A1Publication Date: 2016-11-10
- Inventor: Philippe BOIVIN , Julien DELALLEAU
- Applicant: STMICROELECTRONICS (ROUSSET) SAS
- Priority: FR1456740 20140711
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L27/115 ; H01L27/22 ; H01L29/423 ; H01L21/762 ; H01L45/00 ; H01L43/02 ; H01L43/08 ; H01L21/265 ; H01L27/24 ; H01L29/78

Abstract:
The present disclosure relates to a method of making a memory on semiconductor substrate, comprising: at least one data line, at least one selection line, at least one reference line, at least one memory cell comprising a select transistor having a control gate connected to the selection line, a first conduction terminal connected to a variable impedance element, the select transistor and the variable impedance element coupling the reference line to the data line, the select transistor comprising an embedded vertical gate produced in a trench formed in the substrate, and a channel region opposite a first face of the trench, between a first deep doped region and a second doped region on the surface of the substrate coupled to the variable impedance element.
Public/Granted literature
- US09559297B2 Vertical transistor for resistive memory Public/Granted day:2017-01-31
Information query
IPC分类: