Invention Application
US20160329490A1 VERTICAL TRANSISTOR FOR RESISTIVE MEMORY 审中-公开
电阻记忆体的垂直晶体管

VERTICAL TRANSISTOR FOR RESISTIVE MEMORY
Abstract:
The present disclosure relates to a method of making a memory on semiconductor substrate, comprising: at least one data line, at least one selection line, at least one reference line, at least one memory cell comprising a select transistor having a control gate connected to the selection line, a first conduction terminal connected to a variable impedance element, the select transistor and the variable impedance element coupling the reference line to the data line, the select transistor comprising an embedded vertical gate produced in a trench formed in the substrate, and a channel region opposite a first face of the trench, between a first deep doped region and a second doped region on the surface of the substrate coupled to the variable impedance element.
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