Invention Application
- Patent Title: PIEZOELECTRIC THIN FILM, METHOD OF MANUFACTURING THE SAME, PIEZOELECTRIC THIN FILM MANUFACTURING APPARATUS AND LIQUID EJECTION HEAD
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Application No.: US15230969Application Date: 2016-08-08
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Publication No.: US20160339702A1Publication Date: 2016-11-24
- Inventor: Motokazu Kobayashi , Yoshinori Kotani , Naoyuki Koketsu
- Applicant: CANON KABUSHIKI KAISHA
- Priority: JP2013-249324 20131202
- Main IPC: B41J2/14
- IPC: B41J2/14 ; H01L41/08 ; H01L41/314 ; H01L41/187
Abstract:
A piezoelectric thin film is manufactured by sequentially executing: a step of coating a substrate by applying a coating solution containing an organic solvent and a piezoelectric thin film precursor to form a coating layer; a step of evaporating the organic solvent from the coating layer in a windless environment to obtain a dried coating layer containing the piezoelectric thin film precursor; and a step of heating the dried coating layer to form a piezoelectric thin film from the dried coating layer containing the piezoelectric thin film precursor.
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Information query
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