Invention Application
US20160351720A1 SEMICONDUCTOR DEVICE, MANUFACTURING METHOD OF THE SAME, OR DISPLAY DEVICE INCLUDING THE SAME
审中-公开
半导体器件,其制造方法或包括其的显示器件
- Patent Title: SEMICONDUCTOR DEVICE, MANUFACTURING METHOD OF THE SAME, OR DISPLAY DEVICE INCLUDING THE SAME
- Patent Title (中): 半导体器件,其制造方法或包括其的显示器件
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Application No.: US15159032Application Date: 2016-05-19
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Publication No.: US20160351720A1Publication Date: 2016-12-01
- Inventor: Shunpei YAMAZAKI , Tomonori NAKAYAMA , Motoki NAKASHIMA , Tomoki HIRAMATSU
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Priority: JP2015-106660 20150526
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/04 ; H01L27/12 ; H01L27/32 ; G02F1/1341 ; G02F1/1343 ; G02F1/1362 ; G02F1/133 ; G02F1/1368 ; G02F1/1337 ; H01L29/24 ; H01L29/66

Abstract:
To suppress a change in electrical characteristics and improve reliability in a transistor. The transistor includes a first gate electrode, a first insulating film over the first gate electrode, a second insulating film over the first insulating film, an oxide semiconductor film over the second insulating film, a source electrode electrically connected to the oxide semiconductor film, a drain electrode electrically connected to the oxide semiconductor film, a third insulating film over the oxide semiconductor film, a fourth insulating film over the third insulating film, a second gate electrode over the fourth insulating film, and a fifth insulating film over the second gate electrode. One or more of the second insulating film, the third insulating film, and the fourth insulating film include a halogen element. The halogen element is detected from one or more of a top surface, a bottom surface, and a side surface of the oxide semiconductor film.
Information query
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