Invention Application
- Patent Title: METHOD OF FORMING METAL AND METAL ALLOY FEATURES
- Patent Title (中): 形成金属和金属合金特征的方法
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Application No.: US15174735Application Date: 2016-06-06
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Publication No.: US20160355941A1Publication Date: 2016-12-08
- Inventor: Bioh Kim , Marvin Bernt , Greg Wilson , Paul R. McHugh
- Applicant: APPLIED Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED Materials, Inc.
- Current Assignee: APPLIED Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: C25D5/02
- IPC: C25D5/02 ; H01L21/288 ; C25D7/12 ; C25D21/10 ; C25D3/56

Abstract:
Electric potential, current density, agitation, and deposition rate are controlled to deposit metal alloys, such as tin based solder alloys or magnetic alloys, with minimal variations in the weight ratios of alloying metals at different locations within the deposited metal alloy feature. Alternative embodiments include processes that form metal alloy features wherein the variation in weight ratio of alloying metals within the feature is not necessarily minimized, but is controlled to provide a desired variation. In addition to metal alloys, alternative embodiments include processes for improving the deposition of single metal features.
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