Invention Application
US20160355941A1 METHOD OF FORMING METAL AND METAL ALLOY FEATURES 审中-公开
形成金属和金属合金特征的方法

METHOD OF FORMING METAL AND METAL ALLOY FEATURES
Abstract:
Electric potential, current density, agitation, and deposition rate are controlled to deposit metal alloys, such as tin based solder alloys or magnetic alloys, with minimal variations in the weight ratios of alloying metals at different locations within the deposited metal alloy feature. Alternative embodiments include processes that form metal alloy features wherein the variation in weight ratio of alloying metals within the feature is not necessarily minimized, but is controlled to provide a desired variation. In addition to metal alloys, alternative embodiments include processes for improving the deposition of single metal features.
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