发明申请
- 专利标题: METHOD FOR SLICING WORKPIECE AND PROCESSING LIQUID
- 专利标题(中): 制造工艺和加工液体的方法
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申请号: US15124245申请日: 2015-03-06
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公开(公告)号: US20170015019A1公开(公告)日: 2017-01-19
- 发明人: Keiichi KANBAYASHI
- 申请人: SHIN-ETSU HANDOTAI CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU HANDOTAI CO., LTD.
- 当前专利权人: SHIN-ETSU HANDOTAI CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2014-077178 20140403
- 国际申请: PCT/JP2015/001214 WO 20150306
- 主分类号: B28D5/00
- IPC分类号: B28D5/00 ; B24B27/06 ; B28D5/04
摘要:
The present invention is a method for slicing a workpiece, including: forming a wire row by a wire spirally wound between a plurality of wire guides and traveling in an axial direction, and pressing a workpiece against the wire row while supplying a processing liquid containing abrasive grains to a contact portion between the workpiece and the wire, wherein a used portion of the abrasive grains are subjected to a treatment with a mixed liquid of sulfuric acid and hydrogen peroxide, and the abrasive grains subjected to the treatment are reused for the slicing of a workpiece. This makes it possible to slice a workpiece with suppressing contamination of a wafer with metal impurities when abrasive grains are reused in slicing a workpiece by use of a wire saw.
公开/授权文献
- US10189181B2 Method for slicing workpiece and processing liquid 公开/授权日:2019-01-29
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