Invention Application
- Patent Title: MEMS MICRO-MIRROR ASSEMBLY
- Patent Title (中): MEMS微镜组件
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Application No.: US15225628Application Date: 2016-08-01
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Publication No.: US20170031152A1Publication Date: 2017-02-02
- Inventor: FAOUZI KHECHANA , NICOLAS ABELE
- Applicant: INTEL CORPORATION
- Applicant Address: US CA SANTA CLARA
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA SANTA CLARA
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B7/00 ; H05K1/11 ; H05K1/18 ; H05K3/34 ; H05K1/02 ; G03B21/00 ; B81C3/00

Abstract:
A MEMS micro-mirror assembly (250, 300, 270, 400) comprising, a MEMS device (240) which comprises a MEMS die (241) and a magnet (231); a flexible PCB board (205) to which the MEMS device (240) is mechanically, and electrically, connected; wherein the flexible PCB board (205) further comprises a first extension portion (205b) which comprises a least one electrical contact (259a,b) which is useable to electrically connect the MEMS micro-mirror assembly (250, 300, 270, 400) to another electrical component). There is further provided a projection system comprising such a MEMS micro-mirror assembly (250, 300, 270, 400).
Information query