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公开(公告)号:US20170031152A1
公开(公告)日:2017-02-02
申请号:US15225628
申请日:2016-08-01
Applicant: INTEL CORPORATION
Inventor: FAOUZI KHECHANA , NICOLAS ABELE
CPC classification number: G02B26/085 , B81B7/007 , B81B2201/042 , B81B2207/098 , B81C1/00214 , B81C1/00873 , B81C3/005 , B81C2203/054 , B81C2203/057 , G02B7/1821 , G02B26/0833 , G02B26/105 , G03B21/008 , H01L2224/48091 , H01L2924/1461 , H05K1/0269 , H05K1/0281 , H05K1/118 , H05K1/189 , H05K3/328 , H05K3/34 , H05K2201/083 , H05K2201/10083 , H05K2203/049 , Y10T29/4913 , H01L2924/00014 , H01L2924/00
Abstract: A MEMS micro-mirror assembly (250, 300, 270, 400) comprising, a MEMS device (240) which comprises a MEMS die (241) and a magnet (231); a flexible PCB board (205) to which the MEMS device (240) is mechanically, and electrically, connected; wherein the flexible PCB board (205) further comprises a first extension portion (205b) which comprises a least one electrical contact (259a,b) which is useable to electrically connect the MEMS micro-mirror assembly (250, 300, 270, 400) to another electrical component). There is further provided a projection system comprising such a MEMS micro-mirror assembly (250, 300, 270, 400).
Abstract translation: 包括MEMS器件(240)的MEMS微反射镜组件(250,3300,270,400),其包括MEMS管芯(241)和磁体(231); MEMS器件(240)机械地并电连接到的柔性PCB板(205); 其中所述柔性PCB板还包括第一延伸部分(205b),所述第一延伸部分包括至少一个电触头(259a,b),所述电触头可用于电连接所述MEMS微反射镜组件(250,300,270,400) 到另一个电气部件)。 还提供了一种包括这种MEMS微镜组件(250,300,270,400)的投影系统。
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公开(公告)号:US20180210224A1
公开(公告)日:2018-07-26
申请号:US15925527
申请日:2018-03-19
Applicant: INTEL CORPORATION
Inventor: LUCIO KILCHER , NICOLAS ABELE , FAOUZI KHECHANA
CPC classification number: G02B27/48 , B81C1/00 , G02B5/0215 , G02B5/0278 , G02B26/0833 , G02B26/0875 , G02B26/105 , G03B21/28 , H04N9/3129 , Y10T29/42
Abstract: Optical MEMS scanning micro-mirror comprising:—a movable scanning micro-mirror (101), being pivotally connected to a MEMS body (102) substantially surrounding the lateral sides of the micro-mirror,—a transparent window (202) substantially covering the reflection side of the micro-mirror;—wherein a piezo-actuator assembly (500) and a layer of deformable transparent material (501) are provided on the outer portion of said window (202);—the piezo-actuator assembly (500) being arranged at the periphery of the layer of transparent material (501);—said piezo-actuator assembly (500) and transparent material (501) cooperating so that when actuated, the piezo-actuator assembly (500) causes micro-deformation of the transparent material (501), thereby providing an anti-speckle effect. The invention also provides the corresponding micro-projection system and method for reducing speckle.
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公开(公告)号:US20170237956A9
公开(公告)日:2017-08-17
申请号:US15187691
申请日:2016-06-20
Applicant: INTEL CORPORATION
Inventor: LUCIO KILCHER , FAOUZI KHECHANA
CPC classification number: H04N9/3194 , G01S7/4814 , G01S17/102 , G01S17/42 , G02B26/0833 , G06F3/017 , G06F3/0304 , H04N9/3129 , H04N9/3155 , H04N9/3185 , H04N9/3188
Abstract: An optical micro-projection system comprising the following components: at least one laser light source (200, 400, 402, 600); at least one movable mirror (102, 103, 203) for deviating light from said light source to allow generation of images on a projection surface (104, 301, 303, 306, 603); a self mixing module for measurement of the distance (604) between the projection source and a projection surface, said self mixing module comprising:—at least one photodiode (401, 601) for monitoring the light emission power of the laser light source;—an optical power variation counter for counting optical power variations (605); successive displacements of said mirror allowing the self mixing module providing successive projection distance measurements of a plurality of points of said projection surface. A projection method for optical micro-projection system and a distance measurement method are also provided.
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公开(公告)号:US20180332262A1
公开(公告)日:2018-11-15
申请号:US15911498
申请日:2018-03-05
Applicant: INTEL CORPORATION
Inventor: LUCIO KILCHER , FAOUZI KHECHANA
CPC classification number: H04N9/3194 , G01S7/4814 , G01S17/102 , G01S17/42 , G02B26/0833 , G06F3/017 , G06F3/0304 , H04N9/3129 , H04N9/3155 , H04N9/3185 , H04N9/3188
Abstract: An optical micro-projection system comprising the following components: at least one laser light source (200, 400, 402, 600); at least one movable mirror (102, 103, 203) for deviating light from said light source to allow generation of images on a projection surface (104, 301, 303, 306, 603); a self mixing module for measurement of the distance (604) between the projection source and a projection surface, said self mixing module comprising: —at least one photodiode (401, 601) for monitoring the light emission power of the laser light source; —an optical power variation counter for counting optical power variations (605); successive displacements of said mirror allowing the self mixing module providing successive projection distance measurements of a plurality of points of said projection surface. A projection method for optical micro-projection system and a distance measurement method are also provided.
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公开(公告)号:US20150341609A1
公开(公告)日:2015-11-26
申请号:US14681661
申请日:2015-04-08
Applicant: INTEL CORPORATION
Inventor: LUCIO KILCHER , FAOUZI KHECHANA
CPC classification number: H04N9/3194 , G01S7/4814 , G01S17/102 , G01S17/42 , G02B26/0833 , G06F3/017 , G06F3/0304 , H04N9/3129 , H04N9/3155 , H04N9/3185 , H04N9/3188
Abstract: An optical micro-projection system comprising the following components: at least one laser light source (200, 400, 402, 600); at least one movable mirror (102, 103, 203) for deviating light from said light source to allow generation of images on a projection surface (104, 301, 303, 306, 603); a self mixing module for measurement of the distance (604) between the projection source and a projection surface, said self mixing module comprising:—at least one photodiode (401, 601) for monitoring the light emission power of the laser light source;—an optical power variation counter for counting optical power variations (605); successive displacements of said mirror allowing the self mixing module providing successive projection distance measurements of a plurality of points of said projection surface. A projection method for optical micro-projection system and a distance measurement method are also provided.
Abstract translation: 一种光学微投影系统,包括以下部件:至少一个激光光源(200,400,402,600); 至少一个可移动镜(102,103,203),用于偏离来自所述光源的光,以允许在投影表面(104,301,303,306,603)上产生图像; 用于测量投影源和投影表面之间的距离(604)的自混合模块,所述自混合模块包括: - 用于监测激光光源的发光功率的至少一个光电二极管(401,601); - 用于计算光功率变化的光功率变化计数器(605); 所述镜的连续位移允许自混合模块提供所述投影表面的多个点的连续的投影距离测量。 还提供了一种用于光学微投影系统的投影方法和距离测量方法。
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公开(公告)号:US20150338645A1
公开(公告)日:2015-11-26
申请号:US14654465
申请日:2012-12-20
Applicant: Intel Corporation
Inventor: JULIEN GAMET , FAOUZI KHECHANA
CPC classification number: G02B26/101 , G02B7/008 , G02B26/085
Abstract: A MEMS micro-mirror device comprising, a MEMS micro-mirror, a support structure and, a first and second torsional arm which each connect the MEMS micro-mirror to the support structure, wherein the first and second torsional arms are arranged to define a first oscillation axis about which the MEMS micro-mirror can oscillate; a single actuation coil for oscillating the MEMS micro mirror about the first oscillation axis, at least a portion of the single actuation coil being arranged to cooperate with the MEMS micro mirror; a magnet which is arranged such that a magnetic field generated by the magnet submerges at least the portion of the single actuation coil which cooperates with the MEMS micro mirror; wherein the single actuation coil is configured to extend along the first and second torsional arms.
Abstract translation: 一种MEMS微镜装置,包括MEMS微镜,支撑结构以及第一和第二扭转臂,每个将所述MEMS微镜连接到所述支撑结构,其中所述第一和第二扭转臂被布置成限定 第一振荡轴,MEMS微镜可绕其摆动; 用于围绕第一振荡轴线振荡MEMS微镜的单个致动线圈,单个致动线圈的至少一部分被布置成与MEMS微反射镜协作; 所述磁体被布置成使得由所述磁体产生的磁场至少淹没所述单个致动线圈的与所述MEMS微反射镜协作的部分; 其中所述单个致动线圈被构造成沿着所述第一和第二扭转臂延伸。
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公开(公告)号:US20180081167A1
公开(公告)日:2018-03-22
申请号:US15480304
申请日:2017-04-05
Applicant: INTEL CORPORATION
Inventor: JULIEN GAMET , FAOUZI KHECHANA
CPC classification number: G02B26/101 , G02B7/008 , G02B26/085
Abstract: A MEMS micro-mirror device comprising, a MEMS micro-mirror, a support structure and, a first and second torsional arm which each connect the MEMS micro-mirror to the support structure, wherein the first and second torsional arms are arranged to define a first oscillation axis about which the MEMS micro-mirror can oscillate; a single actuation coil for oscillating the MEMS micro mirror about the first oscillation axis, at least a portion of the single actuation coil being arranged to cooperate with the MEMS micro mirror; a magnet which is arranged such that a magnetic field generated by the magnet submerges at least the portion of the single actuation coil which cooperates with the MEMS micro mirror; wherein the single actuation coil is configured to extend along the first and second torsional arms.
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公开(公告)号:US20170048505A1
公开(公告)日:2017-02-16
申请号:US15187691
申请日:2016-06-20
Applicant: INTEL CORPORATION
Inventor: LUCIO KILCHER , FAOUZI KHECHANA
CPC classification number: H04N9/3194 , G01S7/4814 , G01S17/102 , G01S17/42 , G02B26/0833 , G06F3/017 , G06F3/0304 , H04N9/3129 , H04N9/3155 , H04N9/3185 , H04N9/3188
Abstract: An optical micro-projection system comprising the following components: at least one laser light source (200, 400, 402, 600); at least one movable mirror (102, 103, 203) for deviating light from said light source to allow generation of images on a projection surface (104, 301, 303, 306, 603); a self mixing module for measurement of the distance (604) between the projection source and a projection surface, said self mixing module comprising:—at least one photodiode (401, 601) for monitoring the light emission power of the laser light source;—an optical power variation counter for counting optical power variations (605); successive displacements of said mirror allowing the self mixing module providing successive projection distance measurements of a plurality of points of said projection surface. A projection method for optical micro-projection system and a distance measurement method are also provided.
Abstract translation: 一种光学微投影系统,包括以下部件:至少一个激光光源(200,400,402,600); 至少一个可移动镜(102,103,203),用于偏离来自所述光源的光,以允许在投影表面(104,301,303,306,603)上产生图像; 用于测量投影源和投影表面之间的距离(604)的自混合模块,所述自混合模块包括: - 用于监测激光光源的发光功率的至少一个光电二极管(401,601); - 用于计算光功率变化的光功率变化计数器(605); 所述镜的连续位移允许自混合模块提供所述投影表面的多个点的连续的投影距离测量。 还提供了一种用于光学微投影系统的投影方法和距离测量方法。
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公开(公告)号:US20160195713A1
公开(公告)日:2016-07-07
申请号:US15069281
申请日:2016-03-14
Applicant: INTEL CORPORATION
Inventor: NICOLAS ABELE , FAOUZI KHECHANA , LUCIO KILCHER
CPC classification number: G02B26/101 , G02B26/00 , G02B26/0833 , G03B21/14 , G03B21/2033 , G03B21/28 , H04N9/3129 , Y10T29/49
Abstract: A MEMS micro-mirror device includes, a single package; a first mirror and second mirror, wherein at least one of the mirrors is configured to oscillate along an oscillation axis; wherein both mirrors are located within the single package and are arranged such that as the at least one mirror oscillates, the light incident on the first micro-mirror can be deflected to the second mirror.
Abstract translation: MEMS微镜器件包括:单个封装; 第一反射镜和第二反射镜,其中所述反射镜中的至少一个被配置为沿着振荡轴线振荡; 其中两个反射镜位于单个封装内,并且布置成使得当至少一个反射镜振荡时,入射在第一微镜上的光可以偏转到第二反射镜。
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公开(公告)号:US20160054577A1
公开(公告)日:2016-02-25
申请号:US14833959
申请日:2015-08-24
Applicant: INTEL CORPORATION
Inventor: LUCIO KILCHER , NICOLAS ABELE , FAOUZI KHECHANA
CPC classification number: G02B27/48 , G02B26/0833 , G02B26/105 , G03B21/2033 , H04N9/3129
Abstract: A micro-projection system for projecting light on a projection surface, comprising: at least one coherent light source (101); optical elements (102, 108, 109) in the optical path between said coherent light source and said projection surface; said optical elements including at least one reflective member (102) actuated by a drive signal for deviating light from said light source so as to scan a projected image onto said projecting surface; said optical elements including at least one vibrating element (102) actuated by a vibrating signal so as to reduce speckle onto said projecting surface. The corresponding method for reducing speckle is also provided.
Abstract translation: 一种用于在投影表面上投射光的微投影系统,包括:至少一个相干光源(101); 在所述相干光源和所述投影表面之间的光路中的光学元件(102,108,109); 所述光学元件包括由驱动信号驱动的至少一个反射构件(102),用于偏离来自所述光源的光,以将投影图像扫描到所述突出表面上; 所述光学元件包括由振动信号致动的至少一个振动元件(102),以便减少所述突出表面上的斑点。 还提供了减少斑点的相应方法。
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