Invention Application
- Patent Title: SUBSTRATE LIFT PIN ACTUATOR
- Patent Title (中): 基板提升引脚执行器
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Application No.: US15135496Application Date: 2016-04-21
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Publication No.: US20170032997A1Publication Date: 2017-02-02
- Inventor: Michael D. WILLWERTH , Roberto Cesar COTLEAR
- Applicant: Applied Materials, Inc.
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/67 ; H01L21/683 ; B66F3/24

Abstract:
Implementations described herein provide a lift pin actuator. The lift pin actuator has a housing. The housing has an interior volume. A track is disposed in the interior volume and coupled to the housing. A center shaft is at least partially disposed in the interior volume of the housing. A guide is movably coupled to the track. At least one internal bellows is disposed in the interior volume, the internal bellows form a seal between the center shaft and the housing. An elastic member is disposed in the interior volume and configured to apply a force that retracts the center shaft into the housing. An inlet port is configured to introduce fluid into the interior volume between the internal bellows and the housing. The fluid generates a force opposing the elastic member to extend the center shaft relative to the housing.
Public/Granted literature
- US10283397B2 Substrate lift pin actuator Public/Granted day:2019-05-07
Information query
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