Invention Application
- Patent Title: UV LIGHT EMITTING DIODE AND METHOD OF FABRICATING THE SAME
- Patent Title (中): 紫外线发光二极管及其制造方法
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Application No.: US15294563Application Date: 2016-10-14
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Publication No.: US20170033263A1Publication Date: 2017-02-02
- Inventor: Ki Yon Park , Jeong Hun Heo , Hwa Mok Kim , Gun Woo Han
- Applicant: Seoul Viosys Co., Ltd.
- Priority: KR10-2014-0094958 20140725
- Main IPC: H01L33/32
- IPC: H01L33/32 ; H01L33/06 ; H01L33/00

Abstract:
Exemplary embodiments provide a UV light emitting diode and a method of fabricating the same. The method of fabricating a UV light emitting diode includes growing a first n-type semiconductor layer including AlGaN, wherein growth of the first n-type semiconductor layer includes changing a growth pressure within a growth chamber and changing a flow rate of an n-type dopant source introduced into the growth chamber. A pressure change during growth of the first n-type semiconductor layer includes at least one cycle of a pressure increasing period and a pressure decreasing period over time, and change in flow rate of the n-type dopant source includes increasing the flow rate of the n-type dopant source in the form of at least one pulse. The UV light emitting diode fabricated by the method has excellent crystallinity.
Public/Granted literature
- US09905732B2 UV light emitting diode and method of fabricating the same Public/Granted day:2018-02-27
Information query
IPC分类: