Invention Application
US20170048960A1 SYSTEMS AND METHODS FOR CONTROLLING EUV ENERGY GENERATION USING PULSE INTENSITY 有权
使用脉冲强度控制EUV能量产生的系统和方法

  • Patent Title: SYSTEMS AND METHODS FOR CONTROLLING EUV ENERGY GENERATION USING PULSE INTENSITY
  • Patent Title (中): 使用脉冲强度控制EUV能量产生的系统和方法
  • Application No.: US14824289
    Application Date: 2015-08-12
  • Publication No.: US20170048960A1
    Publication Date: 2017-02-16
  • Inventor: Daniel Jason RiggsRobert Jay Rafac
  • Applicant: ASML Netherlands B.V.
  • Main IPC: H05G2/00
  • IPC: H05G2/00
SYSTEMS AND METHODS FOR CONTROLLING EUV ENERGY GENERATION USING PULSE INTENSITY
Abstract:
In a laser produced plasma (LPP) extreme ultraviolet (EUV) system, a plasma created from droplets irradiated by a laser pulse can become destabilized. The instability of the plasma can reduce the amount of EUV energy generated over time. While other systems seek to stabilize the plasma by varying a pulse width of the laser pulses, the systems and methods described herein stabilize the plasma by varying an intensity of the laser pulses. The intensity of the laser pulses is varied based on a comparison of the amount of EUV energy generated from current pulse to an expected amount of EUV energy. The intensity of the laser pulses can be varied on a pulse-by-pulse basis by an EUV controller that instructs a pulse actuator.
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