Invention Application
- Patent Title: COMPOSITE POLISHING PAD HAVING LAYERS WITH DIFFERENT HARDNESS AND PROCESS FOR PRODUCING THE SAME
- Patent Title (中): 具有不同硬度的层的复合抛光垫及其制造方法
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Application No.: US15234013Application Date: 2016-08-11
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Publication No.: US20170050288A1Publication Date: 2017-02-23
- Inventor: Te-Chao LIAO , Chun-Che TSAO , Wen-Jui CHENG , Tzai-Shing CHEN
- Applicant: NAN YA PLASTICS CORPORATION
- Priority: TW104126675 20150817
- Main IPC: B24B37/22
- IPC: B24B37/22

Abstract:
A polishing pad for surface planarization is made by impregnating a polyester-based fibrous fabric with thermosetting resins to form a porous impregnated material, and heating the porous impregnated material to effect changes in shape of the pores such that an integrally formed polishing pad with hard/soft layers of different hardnesses is obtained; the heated side of the polishing pad has high hardness and high cutting/grinding ability, whereas the unheated side maintains the original tiny pores and low hardness; and the polishing pad can produce a buffering effect when subjected to an external force and in turn apply an evenly distributed force to an article being polished.
Public/Granted literature
- US09975214B2 Composite polishing pad having layers with different hardness and process for producing the same Public/Granted day:2018-05-22
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