Invention Application
US20170050288A1 COMPOSITE POLISHING PAD HAVING LAYERS WITH DIFFERENT HARDNESS AND PROCESS FOR PRODUCING THE SAME 有权
具有不同硬度的层的复合抛光垫及其制造方法

COMPOSITE POLISHING PAD HAVING LAYERS WITH DIFFERENT HARDNESS AND PROCESS FOR PRODUCING THE SAME
Abstract:
A polishing pad for surface planarization is made by impregnating a polyester-based fibrous fabric with thermosetting resins to form a porous impregnated material, and heating the porous impregnated material to effect changes in shape of the pores such that an integrally formed polishing pad with hard/soft layers of different hardnesses is obtained; the heated side of the polishing pad has high hardness and high cutting/grinding ability, whereas the unheated side maintains the original tiny pores and low hardness; and the polishing pad can produce a buffering effect when subjected to an external force and in turn apply an evenly distributed force to an article being polished.
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