COMPOSITE POLISHING PAD HAVING LAYERS WITH DIFFERENT HARDNESS AND PROCESS FOR PRODUCING THE SAME
    1.
    发明申请
    COMPOSITE POLISHING PAD HAVING LAYERS WITH DIFFERENT HARDNESS AND PROCESS FOR PRODUCING THE SAME 有权
    具有不同硬度的层的复合抛光垫及其制造方法

    公开(公告)号:US20170050288A1

    公开(公告)日:2017-02-23

    申请号:US15234013

    申请日:2016-08-11

    IPC分类号: B24B37/22

    CPC分类号: B24B37/22 B24B37/24

    摘要: A polishing pad for surface planarization is made by impregnating a polyester-based fibrous fabric with thermosetting resins to form a porous impregnated material, and heating the porous impregnated material to effect changes in shape of the pores such that an integrally formed polishing pad with hard/soft layers of different hardnesses is obtained; the heated side of the polishing pad has high hardness and high cutting/grinding ability, whereas the unheated side maintains the original tiny pores and low hardness; and the polishing pad can produce a buffering effect when subjected to an external force and in turn apply an evenly distributed force to an article being polished.

    摘要翻译: 通过用热固性树脂浸渍聚酯基纤维织物来形成用于表面平坦化的抛光垫,以形成多孔浸渍材料,并且加热多孔浸渍材料以实现孔的形状的改变,使得整体形成的具有硬/ 获得不同硬度的软层; 抛光垫的加热侧具有高硬度和高切削/磨削能力,而不加热侧保持原有的微细孔和低硬度; 并且抛光垫可以在受到外力时产生缓冲效果,并且对被抛光的物品施加均匀分布的力。