Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
- Patent Title (中): 半导体器件及其制造方法
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Application No.: US15180988Application Date: 2016-06-13
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Publication No.: US20170054010A1Publication Date: 2017-02-23
- Inventor: Hitoshi MATSUURA
- Applicant: RENESAS ELECTRONICS CORPORATION
- Priority: JP2015-163357 20150821
- Main IPC: H01L29/739
- IPC: H01L29/739 ; H01L29/10 ; H01L21/265 ; H01L29/40 ; H01L29/66 ; H01L29/06 ; H01L29/08

Abstract:
To achieve a semiconductor device equipped with a low ON voltage and high load short circuit withstand trench gate IGBT. A collector region on a back surface of a semiconductor substrate is comprised of a relatively lightly-doped P+ type first collector region and a relatively heavily-doped P++ type second collector region. The P++ type second collector region includes, in plan view, interfaces between a first trench having therein a first linear trench gate electrode and an N+ type emitter region formed on the side surface of the first trench and between a second trench having therein a second linear trench gate electrode and an N+ type emitter region formed on the side surface of the second trench. This enables electrons injected from the surface side of the semiconductor substrate to reach the P++ type second collector region and offset, with them, holes injected from the back surface side of the semiconductor substrate.
Public/Granted literature
- US09941396B2 Semiconductor device and method of manufacturing same Public/Granted day:2018-04-10
Information query
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