Invention Application
US20170059490A1 System and Method for Imaging a Sample with an Illumination Source Modified by a Spatial Selective Wavelength Filter 审中-公开
用空间选择波长滤波器修改的照明源成像样品的系统和方法

  • Patent Title: System and Method for Imaging a Sample with an Illumination Source Modified by a Spatial Selective Wavelength Filter
  • Patent Title (中): 用空间选择波长滤波器修改的照明源成像样品的系统和方法
  • Application No.: US14839338
    Application Date: 2015-08-28
  • Publication No.: US20170059490A1
    Publication Date: 2017-03-02
  • Inventor: Wei ZhaoKenneth P. GrossIlya BezelMatthew Panzer
  • Applicant: KLA-Tencor Corporation
  • Main IPC: G01N21/88
  • IPC: G01N21/88 H05G2/00
System and Method for Imaging a Sample with an Illumination Source Modified by a Spatial Selective Wavelength Filter
Abstract:
A system for illuminating a sample with a spectrally filtered illumination source includes an illumination source configured to generate a beam of illumination having a first set of wavelengths. In addition, the system includes a wavelength filtering sub-system, a sample stage, an illumination sub-system, a detector, and an objective to focus illumination from the surface of one or more samples and focus the collected illumination to the detector. Further, the wavelength filtering sub-system includes one or more first dispersive elements positioned to introduce spatial dispersion into the beam, a spatial filter element, and one or more dispersive elements positioned to remove spatial dispersion from the beam. The spatial filter element is further positioned to pass at least a portion of the beam including a second set of wavelengths, wherein the second set of wavelengths is a subset of the first set of wavelengths.
Information query
Patent Agency Ranking
0/0