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公开(公告)号：US10283342B2
公开(公告)日：2019-05-07
申请号：US15360397
申请日：2016-11-23
发明人： Ilya Bezel , Anatoly Shchemelinin , Kenneth P. Gross , Matthew Panzer , Anant Chimmalgi , Lauren Wilson , Joshua Wittenberg
摘要： A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.
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公开(公告)号：US10032620B2
公开(公告)日：2018-07-24
申请号：US14699781
申请日：2015-04-29
发明人： Lauren Wilson , Anant Chimmalgi , Matthew Panzer , Ilya Bezel
摘要： A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.
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公开(公告)号：US10381216B2
公开(公告)日：2019-08-13
申请号：US16231048
申请日：2018-12-21
摘要： An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.
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公开(公告)号：US20180330937A1
公开(公告)日：2018-11-15
申请号：US16042887
申请日：2018-07-23
发明人： Lauren Wilson , Anant Chimmalgi , Matthew Panzer , Ilya Bezel
摘要： A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.
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公开(公告)号：US20160268120A1
公开(公告)日：2016-09-15
申请号：US15064294
申请日：2016-03-08
摘要： An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.
摘要翻译： 用于通过光持续等离子体形成产生宽带光的光学系统包括腔室，照明源，一组聚焦光学器件和一组收集光学器件。 室被配置为在第一相中包含缓冲材料和第二相中的等离子体形成材料。 照明源产生连续波泵照明。 该组聚焦光学器件将连续波泵浦照明通过缓冲材料聚焦到缓冲材料和等离子体形成材料之间的界面上，以便通过激发至少等离子体形成材料产生等离子体。 该组收集光学器件接收从等离子体发出的宽带辐射。
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6.发明授权公开(公告)号：US10520741B2
公开(公告)日：2019-12-31
申请号：US15651968
申请日：2017-07-17
IPC分类号： G02B27/10
摘要： A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.
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公开(公告)号：US10217625B2
公开(公告)日：2019-02-26
申请号：US15064294
申请日：2016-03-08
摘要： An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.
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公开(公告)号：US20180172240A1
公开(公告)日：2018-06-21
申请号：US15895868
申请日：2018-02-13
发明人： Ilya Bezel , Anatoly Shchemelinin , Eugene Shifrin , Matthew Panzer , Matthew Derstine , Jincheng Wang , Anant Chimmalgi , Rajeev Patil , Rudolf Brunner
IPC分类号： F21V9/06 , H01J61/52 , H01J61/40 , H01J61/35 , H01J61/34 , H01J61/16 , H01J61/14 , H01J61/12 , H01J65/04 , H01J61/20
CPC分类号： F21V9/06 , H01J61/125 , H01J61/14 , H01J61/16 , H01J61/20 , H01J61/34 , H01J61/35 , H01J61/40 , H01J61/523 , H01J65/04
摘要： A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.
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公开(公告)号：US10522340B2
公开(公告)日：2019-12-31
申请号：US16042887
申请日：2018-07-23
发明人： Lauren Wilson , Anant Chimmalgi , Matthew Panzer , Ilya Bezel
摘要： A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.
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公开(公告)号：US10163620B2
公开(公告)日：2018-12-25
申请号：US15064294
申请日：2016-03-08
摘要： An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.
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