发明申请
US20170062522A1 Combining Materials in Different Components of Selector Elements of Integrated Circuits
审中-公开
将材料组合在集成电路选择元件的不同组件中
- 专利标题: Combining Materials in Different Components of Selector Elements of Integrated Circuits
- 专利标题(中): 将材料组合在集成电路选择元件的不同组件中
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申请号: US15235992申请日: 2016-08-12
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公开(公告)号: US20170062522A1公开(公告)日: 2017-03-02
- 发明人: Salil Mujumdar , Abhijit Pethe , Ashish Bodke , Kevin Kashefi
- 申请人: Intermolecular, Inc.
- 申请人地址: US CA San Jose
- 专利权人: Intermolecular, Inc.
- 当前专利权人: Intermolecular, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: H01L27/24
- IPC分类号: H01L27/24 ; G11C13/00 ; H01L45/00
摘要:
Provided are selector elements having snapback characteristics and non-volatile memory cells comprising such selector elements. To achieve its snapback characteristic, a selector element may include a dielectric layer comprising an alloy of two or more materials. In the same or other embodiments, the selector element may include a doped electrode, such carbon electrodes doped with silicon, germanium, and/or selenium. Concentrations of different materials forming an alloy may vary throughout the thickness of the dielectric layer. For example, the concentration of the first one alloy material may be higher in the center of the dielectric layer than near the interfaces of the dielectric layer with the electrodes. Some examples of this alloy material include germanium, indium, and aluminum. Examples of other materials in the same alloy include silicon, gallium, arsenic, and antimony. In some embodiments, the alloy is formed by three or more elements, such as indium gallium arsenic.
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