发明申请
- 专利标题: METHOD FOR PRODUCING POLYMER
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申请号: US15383797申请日: 2016-12-19
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公开(公告)号: US20170097567A1公开(公告)日: 2017-04-06
- 发明人: Jun Hatakeyama , Teppei Adachi , Kenji Funatsu
- 申请人: Shin-Etsu Chemical Co., Ltd.
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2015-021331 20150205
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; G03F7/004 ; G03F7/16 ; G03F7/32 ; C08F220/18 ; G03F7/20 ; G03F7/38 ; C08F220/28 ; G03F7/11
摘要:
A polymer comprising recurring units having an acid generator bound to the backbone, and recurring units having an optionally acid labile group-substituted carboxyl group and/or recurring units having an optionally acid labile group-substituted hydroxyl group is obtained by polymerizing corresponding monomers in a solution of a non-polymerizable compound containing a nitrogen atom to which an acid labile group is bound. This prevents deprotection reaction of the acid labile group in the case of positive resist-forming polymer or crosslinking reaction in the case of negative resist-forming polymer.
公开/授权文献
- US10191373B2 Method for producing polymer 公开/授权日:2019-01-29