Invention Application
- Patent Title: TUNABLE GAS DELIVERY ASSEMBLY WITH INTERNAL DIFFUSER AND ANGULAR INJECTION
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Application No.: US15393828Application Date: 2016-12-29
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Publication No.: US20170110292A1Publication Date: 2017-04-20
- Inventor: Vladimir KNYAZIK , Kyle TANTIWONG , Samer BANNA , Waheb BISHARA
- Applicant: Applied Materials, Inc.
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
An apparatus for providing processing gases to a process chamber with improved uniformity is disclosed. One embodiment provides a gas delivery assembly. The gas delivery assembly includes a hub, a nozzle, and one or more gas diffusers disposed in the nozzle. The nozzle has a cylindrical body with a side wall and a top surface. A plurality of injection passages are formed inside the nozzle to deliver processing gases into the process chamber via a plurality of outlets disposed in the side wall. The injection passages are configured to direct process gases out of each outlet disposed in the side wall in a direction which is not radially aligned with a centerline of the hub.
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