A method includes generating at least one laser passivation pulse with process parameters selected to passivate an area of a metal target, and directing the at least one laser passivation pulse to the area in order to produce a passivation layer. Another method further includes, prior to laser passivation, generating at least one laser ablation pulse with process parameters selected to ablate metal from the area of the target, and directing the at least one laser ablation pulse to the area so as to ablate the metal and to provide the area for laser passivation.