Laser patterning of multi-layer structures

    公开(公告)号:US11008644B2

    公开(公告)日:2021-05-18

    申请号:US16141504

    申请日:2018-09-25

    Applicant: nLIGHT, Inc.

    Abstract: A method of non-ablatively laser patterning a multi-layer structure, the multi-layer structure including a substrate, a first layer disposed on the substrate, a second layer disposed on the first layer, and a third layer disposed on the second layer, the method including generating at least one laser pulse having laser parameters selected for non-ablatively changing the conductivity a selected portion of the third layer such that the selected portion becomes non-conductive, and directing the pulse to the multi-layer structure, wherein the conductivity of the first layer is not substantially changed by the pulse.

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    发明申请

    公开(公告)号:US20170129054A1

    公开(公告)日:2017-05-11

    申请号:US15349174

    申请日:2016-11-11

    Applicant: nLIGHT, Inc.

    Inventor: Adam Dittli

    CPC classification number: B23K26/352 B23K26/0006 B23K26/36 B23K2103/05

    Abstract: A method includes generating at least one laser passivation pulse with process parameters selected to passivate an area of a metal target, and directing the at least one laser passivation pulse to the area in order to produce a passivation layer. Another method further includes, prior to laser passivation, generating at least one laser ablation pulse with process parameters selected to ablate metal from the area of the target, and directing the at least one laser ablation pulse to the area so as to ablate the metal and to provide the area for laser passivation.

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