Invention Application
- Patent Title: ELECTRODE MANUFACTURING APPARATUS FOR LITHIUM ION CAPACITOR
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Application No.: US15413827Application Date: 2017-01-24
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Publication No.: US20170130312A1Publication Date: 2017-05-11
- Inventor: Yoshiyuki Kobayashi , Satoshi Taga
- Applicant: Tokyo Electron Limited
- Priority: JP2012-279685 20121221
- Main IPC: C23C4/08
- IPC: C23C4/08 ; C23C4/12 ; H01M10/0525 ; H01G11/06 ; H01M4/587 ; H01G11/50 ; H01G11/32 ; H01G11/86 ; C23C4/137 ; H01M4/04

Abstract:
A time for doping an electrode material on an electrode sheet with a lithium ion can be reduced. The electrode manufacturing apparatus includes a processing chamber 200 to and from which the electrode sheet is loaded and unloaded; and a lithium thermal spraying unit 210 configured to dope a carbon material C with the lithium ion by forming a lithium thin film on the carbon material of the electrode sheet W loaded into the processing chamber while melting and spraying lithium-containing powder. Further, the lithium thermal spraying unit 210 includes a lithium-containing powder supply unit 250 configured to discharge the lithium-containing powder toward the electrode material of the electrode sheet, and at least one heating gas supply unit 260 configured to supply a heating gas that melts the lithium-containing powder discharged from the lithium-containing powder supply unit.
Public/Granted literature
- US09777362B2 Electrode manufacturing apparatus for lithium ion capacitor Public/Granted day:2017-10-03
Information query
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