- 专利标题: OXIDE SINTERED BODY, SPUTTERING TARGET, AND OXIDE SEMICONDUCTOR THIN FILM OBTAINED USING SPUTTERING TARGET
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申请号: US15319578申请日: 2015-06-24
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公开(公告)号: US20170130329A1公开(公告)日: 2017-05-11
- 发明人: Tokuyuki NAKAYAMA , Eiichiro NISHIMURA , Fumihiko MATSUMURA , Masashi IWARA
- 申请人: SUMITOMO METAL MINING CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: SUMITOMO METAL MINING CO., LTD.
- 当前专利权人: SUMITOMO METAL MINING CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2014-131838 20140626
- 国际申请: PCT/JP2015/068159 WO 20150624
- 主分类号: C23C14/34
- IPC分类号: C23C14/34 ; C04B35/64 ; C04B35/622 ; H01L21/02 ; C23C14/08 ; H01L29/22 ; H01L29/24 ; H01L21/465 ; H01J37/34 ; C04B35/01 ; H01L29/786
摘要:
Provided is an oxide sintered body that, when used to obtain an oxide semiconductor thin film by sputtering, can achieve a low carrier concentration and a high carrier mobility. Also provided is a sputtering target using the oxide sintered body. The oxide sintered body contains, as oxides, indium, gallium, and at least one positive divalent element selected from the group consisting of nickel, cobalt, calcium, strontium, and lead. The gallium content, in terms of the atomic ratio Ga/(In+Ga), is from 0.20 to 0.45, and the positive divalent element content, in terms of the atomic ratio M/(In+Ga+M), is from 0.0001 to 0.05. The amorphous oxide semiconductor thin film, which is formed using the oxide sintered body as a sputtering target, can achieve a carrier concentration of less than 3.0×1018 cm−3 and a carrier mobility of at least 10 cm2V−1 sec−1.
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