Invention Application
- Patent Title: INTEGRATED CIRCUITS HAVING MULTIPLE GATE DEVICES WITH DUAL THRESHOLD VOLTAGES AND METHODS FOR FABRICATING SUCH INTEGRATED CIRCUITS
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Application No.: US14938499Application Date: 2015-11-11
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Publication No.: US20170133373A1Publication Date: 2017-05-11
- Inventor: Shyue Seng Tan , Kiok Boone Elgin Quek
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8238 ; H01L29/66

Abstract:
Integrated circuits including multiple gate devices with dual threshold voltages and methods for fabricating such integrated circuits are provided. An exemplary method for fabricating an integrated device includes providing a semiconductor fin structure overlying a semiconductor substrate. The semiconductor fin structure has a first sidewall, a second sidewall opposite the first sidewall, and an upper surface. The method includes forming a first gate along the first sidewall of the semiconductor fin structure with a first threshold voltage. Further, the method includes forming a second gate along the second sidewall of the semiconductor fin structure with a second threshold voltage different from the first threshold voltage.
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Information query
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