Invention Application
- Patent Title: TEMPERATURE SENSOR
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Application No.: US15325525Application Date: 2014-07-14
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Publication No.: US20170138800A1Publication Date: 2017-05-18
- Inventor: Masatoshi TABIRA , Masahisa SUGIHARA , Yuji MIZUMA , Takari YAMAMOTO
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- International Application: PCT/JP2014/003715 WO 20140714
- Main IPC: G01K11/00
- IPC: G01K11/00 ; G01K1/08

Abstract:
A temperature sensor includes a sensing member, a retention member configured to secure the sensing member, an optical fiber configured to irradiate the sensing member with light and guide the light reflected from the sensing member, and a cylindrical sleeve configured to accommodate the optical fiber. The retention member is a plate-shaped component and has a cut-out portion formed on at least one of a peripheral portion of a non-retention surface of the retention member opposite to a retention surface to which the sensing member is secured and a side surface of the retention member. The retention member is secured to a tip of the sleeve so that the non-retention surface is exposed to the outside, and the tip of the sleeve is engaged with the cut-out portion.
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