Invention Application
- Patent Title: METHOD FOR FORMING RESIST PATTERN, METHOD FOR MANUFACTURING PRINTED WIRING BOARD, PHOTOSENSITIVE RESIN COMPOSITION FOR PROJECTION EXPOSURE AND PHOTOSENSITIVE ELEMENT
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Application No.: US15313232Application Date: 2014-12-17
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Publication No.: US20170153551A1Publication Date: 2017-06-01
- Inventor: Masakazu KUME , Momoko MUNAKATA
- Applicant: HITACHI CHEMICAL COMPANY, LTD.
- Priority: JP2014-106946 20140523
- International Application: PCT/JP2014/083421 WO 20141217
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/031 ; H05K3/18 ; G03F7/16 ; G03F7/32 ; H05K3/06 ; G03F7/11 ; G03F7/033

Abstract:
An object is to provide a method for forming a resist pattern able to form a resist pattern, in which the resist shape is favorable, the occurrence of resist footing can be reduced, and the adherence and the aspect ratio are improved; and provided is a method for forming a resist pattern comprising a step of forming a photosensitive resin layer on a substrate using a photosensitive resin composition for projection exposure; a step of exposing the photosensitive resin layer to active light projecting an image of a photomask through a lens; and a step of removing an unexposed part of the photosensitive resin layer from the substrate by development, wherein the photosensitive resin composition for projection exposure comprises an (A) binder polymer, a (B) photopolymerizing compound having an ethylenically unsaturated bond, and a (C) photopolymerization initiator; and a light transmittance of the photosensitive resin layer at a wavelength of 365 nm is not less than 58.0% and not more than 95.0%.
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