Invention Application
- Patent Title: Apparatus of Plural Charged-Particle Beams
-
Application No.: US15365145Application Date: 2016-11-30
-
Publication No.: US20170154756A1Publication Date: 2017-06-01
- Inventor: Weiming Ren , Xuedong Liu , Xuerang Hu , Zhongwei Chen
- Applicant: Hermes Microvision Inc.
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/14 ; H01J37/153 ; H01J37/244 ; H01J37/20

Abstract:
A secondary projection imaging system in a multi-beam apparatus is proposed, which makes the secondary electron detection with high collection efficiency and low cross-talk. The system employs one zoom lens, one projection lens and one anti-scanning deflection unit. The zoom lens and the projection lens respectively perform the zoom function and the anti-rotating function to remain the total imaging magnification and the total image rotation with respect to the landing energies and/or the currents of the plural primary beamlets. The anti-scanning deflection unit performs the anti-scanning function to eliminate the dynamic image displacement due to the deflection scanning of the plural primary beamlets.
Public/Granted literature
- US10141160B2 Apparatus of plural charged-particle beams Public/Granted day:2018-11-27
Information query