- 专利标题: ENHANCED ADHESIVE MATERIALS AND PROCESSES FOR 3D APPLICATIONS
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申请号: US14967353申请日: 2015-12-13
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公开(公告)号: US20170166784A1公开(公告)日: 2017-06-15
- 发明人: James L. Hedrick , Robert Dennis Miller , Deborah Ann Neumayer , Sampath Purushothaman , Mary E. Rothwell , Willi Volksen , Roy R. Yu
- 申请人: James L. Hedrick , Robert Dennis Miller , Deborah Ann Neumayer , Sampath Purushothaman , Mary E. Rothwell , Willi Volksen , Roy R. Yu
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: C09J9/00
- IPC分类号: C09J9/00 ; H01L25/00 ; H01L23/00 ; C09J183/04 ; C09J11/06 ; C09J179/08 ; C09J179/04 ; H01L25/065 ; C09J11/04
摘要:
The present invention relates to CNT filled polymer composite system possessing a high thermal conductivity and high temperature stability so that it is a highly thermally conductive for use in 3D and 4D integration for joining device sub-laminate layers. The CNT/polymer composite also has a CTE close to that of Si, enabling a reduced wafer structural warping during high temperature processing cycling. The composition is tailored to be suitable for coating, curing and patterning by means conventionally known in the art.
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