Invention Application
- Patent Title: APPARATUS AND METHOD FOR IMPARTING DIRECTION-SELECTIVE LIGHT ATTENUATION
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Application No.: US15453337Application Date: 2017-03-08
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Publication No.: US20170176866A1Publication Date: 2017-06-22
- Inventor: Vladimir Dmitriev
- Applicant: Carl Zeiss SMS Ltd.
- Priority: IL234655 20140915
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F1/50

Abstract:
Method, apparatus for imparting direction-selective light attenuation. A method for imparting direction-selective light attenuation to a photomask may include assigning different attenuation levels to light rays of different directions of incidence. The method may also include computing an array of shading elements to attenuate the light rays with the assigned different attenuation levels, depending on the direction of incidence of the light rays. The method may further include inscribing the array of shading elements within a substrate of the photomask.
Public/Granted literature
- US10114294B2 Apparatus and method for imparting direction-selective light attenuation Public/Granted day:2018-10-30
Information query
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