Invention Application
- Patent Title: PROCESS FLAGGING AND CLUSTER DETECTION WITHOUT REQUIRING RECONSTRUCTION
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Application No.: US15377979Application Date: 2016-12-13
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Publication No.: US20170176869A1Publication Date: 2017-06-22
- Inventor: Remco Dirks , Seyed Iman Mossavat , Hugo Augustinus Joseph Cramer
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP15201233.2 20151218
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G06F17/50
Abstract:
A method including determining one or more statistical features from data obtained from a lithography process, a lithography apparatus, a substrate processed by the lithography process or the lithography apparatus, wherein determining the one or more statistical features does not include reconstructing a characteristic of the lithography process, of the lithography apparatus, or of the substrate.
Public/Granted literature
- US10151985B2 Process flagging and cluster detection without requiring reconstruction Public/Granted day:2018-12-11
Information query
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