Invention Application
- Patent Title: FILM FORMATION APPARATUS AND FILM-FORMED WORKPIECE MANUFACTURING METHOD
-
Application No.: US15308638Application Date: 2016-02-29
-
Publication No.: US20170183769A1Publication Date: 2017-06-29
- Inventor: Yotaro FUKUOKA , Sosuke YAGI
- Applicant: SHIBAURA MECHATRONICS CORPORATION
- Priority: JP2015-057784 20150320
- International Application: PCT/JP2016/056079 WO 20160229
- Main IPC: C23C14/54
- IPC: C23C14/54 ; H01J37/34 ; C23C14/34 ; H01J37/32 ; C23C14/50

Abstract:
A film formation apparatus and a film-formed workpiece manufacturing method which are capable of forming a film with a uniform thickness on a workpiece like a three-dimensional object that includes a plurality of surfaces by a simple structure are provided. A film formation apparatus includes a target 21 that is a film formation material including a plane SU3, a power supply unit 3 applying power to the target 21, a rotating unit 4 rotating a workpiece W that is a film formation object around a rotation axis AX1, and a revolving unit 5 revolving the rotating unit 4 around a revolution axis AX2 separate from the rotation axis AX1 to repeatedly make the workpiece W to come close to and move apart from the target 21.
Public/Granted literature
- US10422032B2 Film formation apparatus and film-formed workpiece manufacturing method Public/Granted day:2019-09-24
Information query
IPC分类: