发明申请
- 专利标题: PIEZOELECTRIC MODULE
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申请号: US15465630申请日: 2017-03-22
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公开(公告)号: US20170194933A1公开(公告)日: 2017-07-06
- 发明人: Yutaka KISHIMOTO , Yasuyuki IDA , Hideaki KOBAYASHI
- 申请人: Murata Manufacturing Co., Ltd.
- 优先权: JP2014-220509 20141029
- 主分类号: H03H9/17
- IPC分类号: H03H9/17
摘要:
A piezoelectric module includes a piezoelectric thin film, a fixing layer, and a support substrate. The piezoelectric thin film is supported by the support substrate with the fixing layer in between. Functional conductors are provided on a surface of the piezoelectric thin film. A void is provided in the fixing layer to include a region overlapping with the functional conductors. A conductor pattern defining a circuit element is provided in a region of the void on a surface of the support substrate on the fixing layer side.
公开/授权文献
- US10469054B2 Piezoelectric module 公开/授权日:2019-11-05
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