Invention Application
- Patent Title: CHAMBER COMPONENT WITH PROTECTIVE COATING SUITABLE FOR PROTECTION AGAINST FLUORINE PLASMA
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Application No.: US15473320Application Date: 2017-03-29
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Publication No.: US20170204516A1Publication Date: 2017-07-20
- Inventor: Son T. NGUYEN , Michael FONG
- Applicant: Applied Materials, Inc.
- Main IPC: C23C16/34
- IPC: C23C16/34 ; C23C16/44 ; C23C16/50 ; C23C16/40
Abstract:
Embodiments described herein relate to a protective coating that protects an underlying chamber component (i.e. the object upon which the coating is being deposited) from corrosion or deterioration within a corrosive environment.
Information query
IPC分类:
