公开(公告)号：US20170204516A1

公开(公告)日：2017-07-20

申请号：US15473320

申请日：2017-03-29

Applicant: Applied Materials, Inc.

Inventor： Son T. NGUYEN ,  Michael FONG

IPC: C23C16/34 ,  C23C16/44 ,  C23C16/50 ,  C23C16/40

CPC classification number: C23C16/34 ,  C23C16/40 ,  C23C16/4404 ,  C23C16/4405 ,  C23C16/50

Abstract: Embodiments described herein relate to a protective coating that protects an underlying chamber component (i.e. the object upon which the coating is being deposited) from corrosion or deterioration within a corrosive environment.

公开(公告)号：US20150218700A1

公开(公告)日：2015-08-06

申请号：US14176550

申请日：2014-02-10

Applicant: Applied Materials, Inc.

Inventor： Son T. NGUYEN ,  Michael FONG

IPC: C23C16/50 ,  C23C16/08 ,  C23C16/40

CPC classification number: C23C16/403 ,  C23C16/045 ,  C23C16/30 ,  C23C16/4404 ,  C23C16/4405 ,  C23C16/56

Abstract: Embodiments described herein relate to a protective coating that protects an underlying chamber component (i.e. the object upon which the coating is being deposited) from corrosion or deterioration within a corrosive environment.

Abstract translation: 本文所述的实施方案涉及保护下一个腔室部件（即，其上沉积有涂层的物体）在腐蚀性环境中的腐蚀或劣化的保护涂层。