- 专利标题: VERTICAL MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME
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申请号: US15295034申请日: 2016-10-17
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公开(公告)号: US20170207220A1公开(公告)日: 2017-07-20
- 发明人: Seok-Jung YUN , Joon-Hee LEE , Seong Soon CHO
- 申请人: Seok-Jung YUN , Joon-Hee LEE , Seong Soon CHO
- 优先权: KR10-2016-0004670 20160114
- 主分类号: H01L27/105
- IPC分类号: H01L27/105 ; H01L29/78
摘要:
A vertical memory device may include a plurality of word lines spaced apart in a first direction, each extending in a second direction perpendicular to the first direction and having a first width in a third direction perpendicular to the first and second directions, a dummy word line over an uppermost word line, including an opening and having a portion thereof with the first width in the third direction, a first string selection line (SSL) and a second string selection line (SSL) over the dummy word line, the first and second SSLs being at substantially the same level along the first direction, each of the first and second SSLs having a second width less than the first width in the third direction, and a plurality of vertical channel structures, each through the word lines, the dummy word line, and one of the first and second SSLs.
公开/授权文献
- US09985041B2 Vertical memory devices 公开/授权日:2018-05-29
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