Invention Application
- Patent Title: MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
-
Application No.: US15288233Application Date: 2016-10-07
-
Publication No.: US20170243923A1Publication Date: 2017-08-24
- Inventor: Ji-hyun JEONG , Gwan-hyeob KOH , Dae-hwan KANG
- Applicant: Samsung Electronics Co., Ltd.
- Priority: KR10-2016-0020700 20160222
- Main IPC: H01L27/24
- IPC: H01L27/24 ; G11C13/00 ; H01L45/00

Abstract:
A memory device includes a first electrode line layer including a plurality of first electrode lines extending on a substrate in a first direction and being spaced apart from each other, a second electrode line layer including a plurality of second electrode lines extending on the first electrode line layer in a second direction that is different from the first direction and being spaced apart from each other, and a memory cell layer including a plurality of first memory cells located at a plurality of intersections between the plurality of first electrode lines and the plurality of second electrode lines, each first memory cell including a selection device layer, an intermediate electrode and a variable resistance layer that are sequentially stacked. A side surface of the variable resistance layer is perpendicular to a top surface of the substrate or inclined to be gradually wider toward an upper portion of the variable resistance layer. The first memory cell has a side surface slope so as to have a width gradually decreasing toward its upper portion.
Public/Granted literature
- US09941333B2 Memory device and method of manufacturing the same Public/Granted day:2018-04-10
Information query
IPC分类: