Invention Application
- Patent Title: SEMICONDUCTOR IMAGE SENSOR DEVICE AND MANUFACTURING METHOD OF THE SAME
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Application No.: US15054094Application Date: 2016-02-25
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Publication No.: US20170250211A1Publication Date: 2017-08-31
- Inventor: Chao-Ching Chang , Sheng-Chan Li , Chih-Hui Huang , Jian-Shin Tsai , Cheng-Yi Wu , Chia-Hsing Chou , Yi-Ming Lin , Min-Hui Lin , Chin-Szu Lee
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/02 ; H01L21/762

Abstract:
Semiconductor image sensor devices and manufacturing method of the same are disclosed. The semiconductor image sensor device includes a substrate, a first pixel and a second pixel, and an isolation structure. The first pixel and second pixel are disposed in the substrate, wherein the first and second pixels are neighboring pixels. The isolation structure is disposed in the substrate and between the first and second pixels, wherein the isolation structure includes a dielectric layer, and the dielectric layer includes silicon oxycarbonitride (SiOCN).
Information query
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