Invention Application
- Patent Title: PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
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Application No.: US15427590Application Date: 2017-02-08
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Publication No.: US20170271194A1Publication Date: 2017-09-21
- Inventor: SHOGO OKITA , ATSUSHI HARIKAI , AKIHIRO ITOU
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Priority: JP2016-054776 20160318
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/67 ; H01J37/32 ; H01L21/3065

Abstract:
A plasma processing method includes a mounting process of mounting a holding sheet holding a substrate in a stage provided in a plasma processing apparatus, and a fixing process of fixing the holding sheet to the stage. The plasma processing method further includes a determining process of determining whether or not a contact state of the holding sheet with the stage is good or bad after the fixing process, and a plasma etching process of etching the substrate by exposing a surface of the substrate to plasma on the stage, in a case in which the contact state is determined to be good in the determining process.
Public/Granted literature
- US10297489B2 Plasma processing method and plasma processing apparatus Public/Granted day:2019-05-21
Information query
IPC分类: