Invention Application
- Patent Title: METHOD TO REDUCE LINE WAVINESS
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Application No.: US15188193Application Date: 2016-06-21
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Publication No.: US20170293232A1Publication Date: 2017-10-12
- Inventor: Joseph R. JOHNSON , Christopher Dennis BENCHER , Thomas L. LAIDIG
- Applicant: Applied Materials, Inc.
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
Embodiments disclosed herein relate to an exposure pattern alteration software application which manipulates exposure polygons having lines with angles substantially close to angles of symmetry of a hex close pack arrangement, which suffer from long jogs. Long jogs present themselves as high edge placement error regions. As such, the exposure pattern alteration software application provides for line wave reduction by serrating polygon edges at affected angles to reduce edge placement errors during maskless lithography patterning in a manufacturing process.
Public/Granted literature
- US09791786B1 Method to reduce line waviness Public/Granted day:2017-10-17
Information query
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