Invention Application
- Patent Title: MEMS TRANSDUCERS IN A PHASED ARRAY COUPLED TO A FLEXIBLE SUBSTRATE USING CARBON NANOTUBES FOR CONFORMAL ULTRASOUND SCANNING
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Application No.: US15135210Application Date: 2016-04-21
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Publication No.: US20170307568A1Publication Date: 2017-10-26
- Inventor: Keith D. Humfeld , Morteza Safai
- Applicant: The Boeing Company
- Applicant Address: US IL Chicago
- Assignee: The Boeing Company
- Current Assignee: The Boeing Company
- Current Assignee Address: US IL Chicago
- Main IPC: G01N29/26
- IPC: G01N29/26 ; B82Y30/00

Abstract:
A plurality of micro-electro-mechanical system (MEMS) transducers in a phased array are coupled to a flexible substrate using carbon nanotubes (CNTs) for conformal ultrasound scanning. Each transducer comprises a cantilever, magnetic material deposited on the cantilever, and a solenoid positioned relative to the magnetic material. The carbon nanotubes are grown on the cantilever and mechanically couple the transducer to one side of the flexible substrate. The other side of the flexible substrate is applied to a surface of a part under inspection, and the transducers are electrically connected to a processer to cause movement of the cantilevers when the solenoids are energized by the processor. The movement of the cantilevers results in movement of the carbon nanotubes, which imparts a force to the flexible substrate that results in ultrasound waves, which permeate the part. Returns from the ultrasound waves are interpreted by the processor to generate images of the part.
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