Invention Application
- Patent Title: EXTREME ULTRAVIOLET LITHOGRAPHY PHOTOMASKS
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Application No.: US15139994Application Date: 2016-04-27
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Publication No.: US20170315438A1Publication Date: 2017-11-02
- Inventor: Zhengqing John Qi , Christina A. Turley , Jed H. Rankin
- Applicant: GLOBALFOUNDRIES INC.
- Main IPC: G03F1/24
- IPC: G03F1/24

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to modified surfaces of extreme ultraviolet lithography photomasks and methods of manufacture. The structure includes a reflective surface having a patterned design, and a black border region at edges of the patterned design. The black border region includes a modified surface morphology to direct light away from reaching a subsequent mirror.
Public/Granted literature
- US09946152B2 Extreme ultraviolet lithography photomasks Public/Granted day:2018-04-17
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