Invention Application
- Patent Title: EMBEDDED TEMPERATURE CONTROL SYSTEM FOR A BIOSENSOR
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Application No.: US15216853Application Date: 2016-07-22
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Publication No.: US20170343498A1Publication Date: 2017-11-30
- Inventor: Alexander Kalnitsky , Yi-Hsien Chang , Chun-Ren Cheng , Jui-Cheng Huang , Shih-Fen Huang , Tung-Tsun Chen , Ching-Hui Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Main IPC: G01N27/04
- IPC: G01N27/04 ; H01L21/768 ; H01L23/522 ; H01L29/786
Abstract:
A biosensor with a heater embedded therein is provided. A semiconductor substrate comprises a source region and a drain region. The heater is under the semiconductor substrate. A sensing well is over the semiconductor substrate, laterally between the source region and the drain region. A sensing layer lines the sensing well. A method for manufacturing the biosensor is also provided.
Public/Granted literature
- US10522400B2 Embedded temperature control system for a biosensor Public/Granted day:2019-12-31
Information query
