Invention Application
- Patent Title: ACCELERATION SENSOR HAVING A REDUCED BIAS AND MANUFACTURING METHOD FOR AN ACCELERATION SENSOR
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Application No.: US15541389Application Date: 2016-01-04
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Publication No.: US20170343579A1Publication Date: 2017-11-30
- Inventor: PETER LEINFELDER
- Applicant: NORTHROP GRUMMAN LITEF GMBH
- Applicant Address: DE FREIBURG
- Assignee: NORTHROP GRUMMAN LITEF GMBH
- Current Assignee: NORTHROP GRUMMAN LITEF GMBH
- Current Assignee Address: DE FREIBURG
- Priority: EP102015000158.2 20150105
- International Application: PCT/EP2016/050014 WO 20160104
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/08

Abstract:
The invention relates to an acceleration sensor (400) comprising an excitation mass (420) having excitation electrodes (430), which excitation mass is movably mounted over a substrate (410) along a movement axis (x) and comprising detection electrodes (440) which are permanently connected to the substrate (410) and allocated to the excitation electrodes (430). A first group of pairings (450) of excitation electrode (430) and allocated detection electrodes (440) is suitable for deflecting the excitation mass (420) along the movement axis (x) in a first direction (460). A second group of pairings (450) of excitation electrodes (430) and allocated detection electrodes (440) is suitable for deflecting the excitation mass (420) along the movement axis (x) in a second direction (465), which is opposite the first direction (460). The number of pairings (450) in the first group is equal to the number of pairings (450) in the second group. The averaged distance between excitation electrodes (430) and detection electrodes (440) of the pairings (450) of the first group corresponds to the averaged distance between excitation electrodes (430) and detection electrodes (440) of the pairings (450) of the second group.
Public/Granted literature
- US09983226B2 Acceleration sensor having a reduced bias and manufacturing method for an acceleration sensor Public/Granted day:2018-05-29
Information query
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